Syms, R. and Zou, H. and Stagg, J. and Yao, J. and Uttamchandani, D.G. (2004) Optical fibre aligner using deep-etched silicon electrothermal actuator. In: IEEE/LEOS Optical MEMS International Conference on optical MEMS and their applications, 2004-08-22 - 2004-08-26, Kagawa.
Full text not available in this repository. (Request a copy from the Strathclyde author)Abstract
A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-thermal microactuator has been developed. The bi-directional fibre alignment device, for use with standard single mode optical fibres, is formed from two opposed microactuators, and includes an etched channel with microsprings for fibre retention. The device is fabricated by deep reactive ion etching (DRIE) of bonded silicon-on-insulator. The optical/electrical/mechanical characteristics of the MEMS fibre aligner have been measured. The drive efficiency of the actuator peaks at around 6μm/Watt, whilst when configuring the device as a single mode fibre variable optical attenuator the fibre-to-fibre attenuation of the device is 24dB before failure.
| Item type: | Conference or Workshop Item (Paper) |
|---|---|
| ID code: | 38499 |
| Keywords: | Microelectromechanical systems, optical fibre alignment, variable optical attenuator , buckling microactuator, micro-opto-electromechanical systems , MEMS, VOA , MOEMS, Electrical engineering. Electronics Nuclear engineering |
| Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
| Department: | Faculty of Engineering > Electronic and Electrical Engineering |
| Related URLs: | |
| Depositing user: | Pure Administrator |
| Date Deposited: | 14 Mar 2012 14:37 |
| Last modified: | 04 Oct 2012 17:15 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/38499 |
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