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Simultaneous composition and cathodoluminescence spectral mapping of III-nitride structures

Edwards, P.R. and Martin, R.W. and O'Donnell, K.P. and Watson, I.M. (2003) Simultaneous composition and cathodoluminescence spectral mapping of III-nitride structures. Journal of Physics: Conference Series (180). pp. 293-296. ISSN 1742-6596

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Gallium nitride based structures have been characterised using the novel approach of simultaneous wavelength-dispersive X-ray microanalysis and cathodoluminescence spectral mapping. Details are presented of the instrumentation developed to carry out such measurements. Application of the technique to MOVPE-grown indium gallium nitride epilayers shows microscopic variations in the indium content, which correlate directly with spatially-dependent shifts observed in the peak wavelength of the luminescence spectrum. Regions of higher indium content are shown to emit at lower energy, mirroring equivalent macroscopic observations