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Femtosecond laser micromachining of sapphire

Kim, K.S. and Jones, D.R. and Bente, E.A.J.M. and Girkin, J.M. and Dawson, M.D. (2001) Femtosecond laser micromachining of sapphire. In: 14th Annual Meeting of the IEEE Lasers-and-Electro-Optics-Society, 2001-11-11 - 2001-11-15.

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Abstract

50 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material