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Detailed study of scratch drive actuator characteristics using high-speed imaging

Li, L. and Brown, J.G. and Uttamchandani, D.G. (2001) Detailed study of scratch drive actuator characteristics using high-speed imaging. In: Conference on Reliability, Testing, and Characterization of MEMS/MOEMS, 2001-10-22 - 2001-10-24, San Francisco.

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Abstract

Microactuators are one of the key components in MEMS and Microsystems technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the characteristics of SDAs fabricated using the Cronos Microsystems MUMPs process. The motivation is to compare the response of SDAs located on the same die, and SDAs located on the different dies from the same fabrication batch. A high-speed imaging camera has been used to precisely determine important SDA characteristics such as step size, velocity, maximum velocity, and acceleration over long travel distance. These measurements are important from a repeatability point of view, and in order to fully exploit the potential of the SDA as a precise positioning mechanism. 2- and 3-stage SDAs have been designed and fabricated for these experiments. Typical step sizes varying from 7 nm at a driving voltage of 60 V to 23 nm at 290 V have been obtained.

Item type: Conference or Workshop Item (Paper)
ID code: 37593
Keywords: microactuator , high-speed imaging, MEMS characterization, surface micromachining, scratch drive, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 10 Feb 2012 16:42
    Last modified: 17 Jul 2013 15:07
    URI: http://strathprints.strath.ac.uk/id/eprint/37593

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