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The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs.

Strathprints serves world leading Open Access research by the University of Strathclyde, including research by the Strathclyde Institute of Pharmacy and Biomedical Sciences (SIPBS), where research centres such as the Industrial Biotechnology Innovation Centre (IBioIC), the Cancer Research UK Formulation Unit, SeaBioTech and the Centre for Biophotonics are based.

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Topographic effects in low-energy radiation damage

Rahman, M and Mathieson, K (2000) Topographic effects in low-energy radiation damage. Applied Physics Letters, 77 (9). pp. 1322-1324. ISSN 0003-6951

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Abstract

We have studied the effect of low-index channeling on sidewall dry-etch damage. A quantum electron beam in the two-dimensional electron gas of a GaAs/AlGaAs heterostructure was used to probe electrical damage at a specific depth down an etched sidewall. In analyzing the measured behavior as a function of etch time we have developed a model for the sidewall damage distribution that takes into account the geometry of the 〈110〉 channels in detail. The analysis shows that more damage is possible beneath regions of high topography than is usually assumed.