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Topographic effects in low-energy radiation damage

Rahman, M and Mathieson, K (2000) Topographic effects in low-energy radiation damage. Applied Physics Letters, 77 (9). pp. 1322-1324. ISSN 0003-6951

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Abstract

We have studied the effect of low-index channeling on sidewall dry-etch damage. A quantum electron beam in the two-dimensional electron gas of a GaAs/AlGaAs heterostructure was used to probe electrical damage at a specific depth down an etched sidewall. In analyzing the measured behavior as a function of etch time we have developed a model for the sidewall damage distribution that takes into account the geometry of the 〈110〉 channels in detail. The analysis shows that more damage is possible beneath regions of high topography than is usually assumed.

Item type: Article
ID code: 37553
Keywords: photonics, radiation damage , radiation , optics, Optics. Light
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 09 Feb 2012 16:35
    Last modified: 12 Mar 2012 11:46
    URI: http://strathprints.strath.ac.uk/id/eprint/37553

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