Strathprints logo
Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Micromachining of gallium nitride, sapphire and silicon carbide using ultra-short pulses

Rice, G.B. and Jones, D.R. and Kim, K.S. and Girkin, J.M. and Jarozynski, D. and Dawson, M.D. (2003) Micromachining of gallium nitride, sapphire and silicon carbide using ultra-short pulses. Proceedings of SPIE the International Society for Optical Engineering, 5147. pp. 299-307. ISSN 0277-786X

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

Controlled ablation of GaN, sapphire and SiC was investigated using both nanosecond and femtosecond laser pulses. Well-defined patterns of feature size similar to 10's of microns were successfully machined by fs pulses in all materials. Nanosecond (355nm) machining was primarily successful in machining GaN. Results for the different materials and pulse duration regimes are. compared and contrasted.

Item type: Article
ID code: 37253
Notes: Alt02 International Conference on Advanced Laser Technologies (2003)
Keywords: gallium nitride , sapphire , silicon carbide , ultra-short pulses, optical engineering, Physics, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Applied Mathematics, Computer Science Applications
Subjects: Science > Physics
Department: Faculty of Science > Physics
Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 31 Jan 2012 16:00
    Last modified: 08 Jul 2014 05:00
    URI: http://strathprints.strath.ac.uk/id/eprint/37253

    Actions (login required)

    View Item