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Optical MEMS using commercial foundries

Uttamchandani, D.G. (2005) Optical MEMS using commercial foundries. In: Guided wave optical components and devices. Academic Press, pp. 353-369. ISBN 9780120884810

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Abstract

This chapter explores optical MEMS using commercial foundries

Item type: Book Section
ID code: 36865
Keywords: optical mems, commercial foundries, fabrication, experimental, design, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 19 Jan 2012 15:01
    Last modified: 17 Jul 2013 13:18
    URI: http://strathprints.strath.ac.uk/id/eprint/36865

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