Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Modified asymmetric micro-electrothermal actuator: analysis and experimentation

Li, Lijie and Uttamchandani, D.G. (2004) Modified asymmetric micro-electrothermal actuator: analysis and experimentation. Journal of Micromechanics and Microengineering, 14 (12). pp. 1734-1741. ISSN 0960-1317

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

A modified design to generate large deflection and to control the peak temperature of the hot beam of a two-beam asymmetric thermal microactuator is presented. The analysis undertaken shows that when changing the dimensions of a section of the hot beam, it is possible to achieve a higher average temperature but a lower peak temperature within the hot beam. The design variables have been investigated, and theoretical results from the investigation are reported. The analysis undertaken shows the impact that the hot beam geometry has on the temperature distribution, and how this can be optimized to avoid local hot spots which lead to thermal failure. A dimensionless thermal parameter which determines the temperature distribution is introduced in the analysis. Thermo-mechanical analysis of the modified actuator is also undertaken in order to calculate the deflection of the modified actuator design. Experimental results confirm that this design achieves greater deflection than the classical asymmetric design whose deflection is limited because the temperature in the central part of the hot beam can reach such a high value that the structural material (polysilicon) experiences thermal failure, and is subsequently unusable.

Item type: Article
ID code: 3562
Keywords: polysilicon, polycrystal actuator, electrothermics, microactuators, microengineering, Electrical engineering. Electronics Nuclear engineering, Mechanics of Materials, Mechanical Engineering, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 13 Jun 2007
    Last modified: 04 Sep 2014 12:17
    URI: http://strathprints.strath.ac.uk/id/eprint/3562

    Actions (login required)

    View Item