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Nanolithography: written with light

Hernandez-Santana, Aaron and Graham, Duncan (2010) Nanolithography: written with light. Nature Nanotechnology, 5 (9). pp. 629-630. ISSN 1748-3387

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Abstract

An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.