Forbes, C. (2004) Active-matrix thin-film transistor array backplane. H01L021/00.Full text not available in this repository. (Request a copy from the Strathclyde author)
A thin film transistor array fabricated on a polyimide substrate forms a backplane for an electronic display. The thin film transistor array incorporates gate electrodes, a gate insulating layer, semiconducting channel layers deposited on top of the gate insulating layer, a source electrode, a drain electrode and a contact layer beneath each of the source and drain electrodes and in contact with at least the channel layer. An insulating encapsulation layer is positioned on the channel layer. The layers are deposited onto the polyimide substrate using PECVD and etched using photolithography to form the backplane.
|Keywords:||thin film, substrate conductivity, gate electrodes, polymide substrate, Electrical engineering. Electronics Nuclear engineering|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering|
|Depositing user:||Pure Administrator|
|Date Deposited:||30 Sep 2011 08:27|
|Last modified:||29 Apr 2016 07:03|