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On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

Pincik, E. and Falcony, C. and Gleskova, H. and Brunner, R. and Ortega, L. and Nadazdy, V. and Mullerova, J. and Gmucova, K. and Durny, R. (2002) On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality. In: Book of abstracts. Sociedad Mexicana de Ciencia de Superficies Y Vacío A.C., Veracruz, Mexico.

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Abstract

A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality