Pincik, E. and Gmucova, K. and Jergel, M. and Mullerova, J. and Gleskova, H. and Nadazdy, V. and van Swaaij, R. A. C. M. M. and Durny, R. and Brunner, R. and Zeman, M. and Kucera, M. and Ortega, L. and Zahoran, M. (2002) On interaction of RF plasmas and amorphous silicon. In: Proceedings of the 8th international workshop on applied physics of condensed matter. 8th International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, June 2002 . Comenius University Press, pp. 214-215. ISBN 8080401861
Full text not available in this repository. (Request a copy from the Strathclyde author)Abstract
A chapter on interaction of RF plasmas and amorphous silicon
| Item type: | Book Section |
|---|---|
| ID code: | 33480 |
| Keywords: | interaction, rf plasmas, amorphous silicon, Electrical engineering. Electronics Nuclear engineering |
| Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
| Department: | Faculty of Engineering > Electronic and Electrical Engineering |
| Related URLs: | |
| Depositing user: | Pure Administrator |
| Date Deposited: | 08 Nov 2011 14:27 |
| Last modified: | 04 Oct 2012 16:33 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/33480 |
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