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On interaction of RF plasmas and amorphous silicon

Pincik, E. and Gmucova, K. and Jergel, M. and Mullerova, J. and Gleskova, H. and Nadazdy, V. and van Swaaij, R. A. C. M. M. and Durny, R. and Brunner, R. and Zeman, M. and Kucera, M. and Ortega, L. and Zahoran, M. (2002) On interaction of RF plasmas and amorphous silicon. In: Proceedings of the 8th international workshop on applied physics of condensed matter. 8th International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, June 2002 . Comenius University Press, pp. 214-215. ISBN 8080401861

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Abstract

A chapter on interaction of RF plasmas and amorphous silicon

Item type: Book Section
ID code: 33480
Keywords: interaction, rf plasmas, amorphous silicon, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 08 Nov 2011 14:27
    Last modified: 06 Sep 2014 07:16
    URI: http://strathprints.strath.ac.uk/id/eprint/33480

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