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On interaction of RF plasmas and amorphous silicon

Pincik, E. and Gmucova, K. and Jergel, M. and Mullerova, J. and Gleskova, H. and Nadazdy, V. and van Swaaij, R. A. C. M. M. and Durny, R. and Brunner, R. and Zeman, M. and Kucera, M. and Ortega, L. and Zahoran, M. (2002) On interaction of RF plasmas and amorphous silicon. In: Proceedings of the 8th international workshop on applied physics of condensed matter. Comenius University Press, pp. 214-215. ISBN 8080401861

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Abstract

A chapter on interaction of RF plasmas and amorphous silicon