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On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

Pincik, E. and Gleskova, H. and Zahoran, M. and Gmucova, K. and Jergel, M. and Falcony, C. and Ortega, L. and Brunner, R. and Holoubek, T. and Jurani, R. (2002) On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. In: Book of abstracts. Comenius University Press, Bratislava, Slovakia. ISBN 8022407372

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Abstract

A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films