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Silicon for thin-film transistors

Wagner, S. and Gleskova, Helena and Cheng, I. C. and Wu, M. (2003) Silicon for thin-film transistors. In: Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. Elsevier, Amsterdam, pp. 1-6.

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Abstract

This chapter looks at silicon for thin-film transistors.