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Electrical stability of a-Si:H TFTs fabricated at 150ºC

Gleskova, Helena and Wagner, S. (2001) Electrical stability of a-Si:H TFTs fabricated at 150ºC. In: Amorphous and heterogeneous silicon-based films – 2001. MRS Symposium Proceedings, 664 . Materials Research Society, Warrendale, PA, A19.7.1-A19.7.6. ISBN 9781558996007

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Abstract

This chapter looks at electrical stability of a-Si:H TFTs fabricated at 150ºC