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CO2 laser annealing of Al/a-Si:H contact

Gleskova, Helena and Ilchenko, V. V. and Skryshevsky, V. A. and Strikha, V. I. (1993) CO2 laser annealing of Al/a-Si:H contact. Czechoslovak Journal of Physics, 43 (2). pp. 169-178. ISSN 0011-4626

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Abstract

he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.