Wagner, S. and Gleskova, Helena and Sturm, J. C. and Suo, Z. (2000) Novel processing technology for microelectronics. In: Technology and applications of hydrogenated amorphous silicon. Materials Science, 37 . Springer, Berlin, Germany, pp. 222-251. ISBN 9783540657149
Full text not available in this repository. (Request a copy from the Strathclyde author)| Item type: | Book Section |
|---|---|
| ID code: | 33405 |
| Keywords: | novel , processing technology, microelectronics, Electrical engineering. Electronics Nuclear engineering |
| Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
| Department: | Faculty of Engineering > Electronic and Electrical Engineering |
| Related URLs: | |
| Depositing user: | Pure Administrator |
| Date Deposited: | 01 Nov 2011 14:23 |
| Last modified: | 04 Oct 2012 16:33 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/33405 |
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