Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Novel processing technology for microelectronics

Wagner, S. and Gleskova, Helena and Sturm, J. C. and Suo, Z. (2000) Novel processing technology for microelectronics. In: Technology and applications of hydrogenated amorphous silicon. Materials Science, 37 . Springer, Berlin, Germany, pp. 222-251. ISBN 9783540657149

Full text not available in this repository. (Request a copy from the Strathclyde author)
Item type: Book Section
ID code: 33405
Keywords: novel , processing technology, microelectronics, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
Depositing user: Pure Administrator
Date Deposited: 01 Nov 2011 14:23
Last modified: 04 Oct 2012 16:33
URI: http://strathprints.strath.ac.uk/id/eprint/33405

Actions (login required)

View Item