Gleskova, Helena (2000) Electrophotographic patterning of thin-film circuits. US6080606.Full text not available in this repository. (Request a copy from the Strathclyde author)
Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.
|Keywords:||electrophotographic patterning , thin-film circuits, Electrical engineering. Electronics Nuclear engineering|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering|
|Depositing user:||Pure Administrator|
|Date Deposited:||23 Nov 2011 16:40|
|Last modified:||03 Nov 2016 01:26|