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Electrophotographic patterning of thin-film circuits

Gleskova, Helena (2000) Electrophotographic patterning of thin-film circuits. US6080606.

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Abstract

Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.

Item type: Patent
ID code: 33404
Keywords: electrophotographic patterning , thin-film circuits, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Pure Administrator
    Date Deposited: 23 Nov 2011 16:40
    Last modified: 04 Oct 2012 18:01
    URI: http://strathprints.strath.ac.uk/id/eprint/33404

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