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Control of solid-state lasers using an intra-cavity MEMS micromirror

Lubeigt, Walter and Gomes, Joao and Brown, James and Kelly, Andrew and Savitski, Vasili and Uttamchandani, Deepak and Burns, David (2011) Control of solid-state lasers using an intra-cavity MEMS micromirror. Optics Express, 19 (3). pp. 2456-2465. ISSN 1094-4087

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High reflectivity, electrothermal and electrostatic MEMS (Micro-Electro-Mechanical Systems) micromirrors were used as a control element within a Nd-doped laser cavity. Stable continuous-wave oscillation of a 3-mirror Nd:YLF laser at a maximum output power of 200mW was limited by thermally-induced surface deformation of the micromirror. An electrostatic micromirror was used to induce Q-switching, resulting in pulse durations of 220ns - 2μs over a repetition frequency range of 6kHz - 40kHz.