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MEMS microwave device with switchable capacitive and inductive states

Li, L. and Uttamchandani, D.G. (2008) MEMS microwave device with switchable capacitive and inductive states. Micro and Nano Letters, 3 (3). pp. 77-81. ISSN 1750-0443

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Abstract

A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).

Item type: Article
ID code: 19237
Keywords: capacitors, coplanar waveguides, inductors, micromachining, micromechanical devices, microwave devices, MEMS microwave device, capacitive-inductive switchover, chevron microactuator, commercial foundry process, coplanar waveguide architecture, electroplated nickel, frequency 1 GHz to 16 GHz, front-side bulk micromachining, interdigitated comb fingers, switchable capacitive state, switchable inductive state, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 01 Sep 2010 10:30
    Last modified: 17 Jul 2013 00:39
    URI: http://strathprints.strath.ac.uk/id/eprint/19237

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