Li, L. and Uttamchandani, D.G. (2008) MEMS microwave device with switchable capacitive and inductive states. Micro and Nano Letters, 3 (3). pp. 77-81. ISSN 1750-0443Full text not available in this repository. (Request a copy from the Strathclyde author)
A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).
|Keywords:||capacitors, coplanar waveguides, inductors, micromachining, micromechanical devices, microwave devices, MEMS microwave device, capacitive-inductive switchover, chevron microactuator, commercial foundry process, coplanar waveguide architecture, electroplated nickel, frequency 1 GHz to 16 GHz, front-side bulk micromachining, interdigitated comb fingers, switchable capacitive state, switchable inductive state, Electrical engineering. Electronics Nuclear engineering, Biomedical Engineering, Bioengineering, Materials Science(all), Condensed Matter Physics|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering|
|Depositing user:||Strathprints Administrator|
|Date Deposited:||01 Sep 2010 09:30|
|Last modified:||22 Mar 2017 10:43|