Picture of athlete cycling

Open Access research with a real impact on health...

The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by Strathclyde researchers, including by researchers from the Physical Activity for Health Group based within the School of Psychological Sciences & Health. Research here seeks to better understand how and why physical activity improves health, gain a better understanding of the amount, intensity, and type of physical activity needed for health benefits, and evaluate the effect of interventions to promote physical activity.

Explore open research content by Physical Activity for Health...

Maskless ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes

Elfstrom, D. and Guilhabert, B.J.E. and McKendry, J. and Poland, S.P. and Gong, Z. and Massoubre, D. and Valentine, G.J. and Gu, E. and Dawson, M.D. and Richardson, E. and Rae, B.R. and Blanco-Gomez, G. and Cooper, J.M. and Henderson, R.K. (2009) Maskless ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes. Optics Express, 17 (26). pp. 23522-23529. ISSN 1094-4087

Full text not available in this repository. Request a copy from the Strathclyde author

Abstract

We report on an approach to ultraviolet (UV) photolithography and direct writing where both the exposure pattern and dose are determined by a complementary metal oxide semiconductor (CMOS) controlled micro-pixellated light emitting diode array. The 370 nm UV light from a demonstrator 8 x 8 gallium nitride micro-pixel LED is projected onto photoresist covered substrates using two back-to-back microscope objectives, allowing controlled demagnification. In the present setup, the system is capable of delivering up to 8.8 W/cm2 per imaged pixel in circular spots of diameter approximately 8 microm. We show example structures written in positive as well as in negative photoresist.