Strathprints logo
Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Fabrication and spectroscopy of GaN microcavities made by epitaxial lift-off

Xiong, C. and Rizzi, F. and Bejtka, K. and Edwards, P. R. and Gu, E. and Dawson, M. D. and Martin, R. W. and Watson, I. M. (2010) Fabrication and spectroscopy of GaN microcavities made by epitaxial lift-off. Superlattices and Microstructures, 47 (1). pp. 129-133. ISSN 0749-6036

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

A novel epitaxial lift-off process for III-nitrides, involving selective removal of a sacrificial (Al, In)N layer in a hot nitric acid etchant, is reported. This was applied to the fabrication of 1−λ GaN planar microcavities bounded by two dielectric DBRs, starting from epitaxial GaN-(Al, In)N-GaN trilayers grown on free-standing GaN or high-quality GaN template material. An optically smooth surface was retained on the GaN surface exposed to the nitric acid etch, with root mean square roughness values as low as 2 nm over 8 μm×8 μm areas. Photoluminescence and reflectivity spectra were recorded from completed microcavities, and the latter showed clear dips in the region of 3.5 eV.

Item type: Article
ID code: 16514
Keywords: gallium nitride, aluminium indium nitride, microcavity, wet etching, reflectance, photoluminescencegallium nitride, photoluminescence, Physics, Materials Science(all), Electrical and Electronic Engineering, Condensed Matter Physics
Subjects: Science > Physics
Department: Faculty of Science > Physics
Faculty of Science > Institute of Photonics
Related URLs:
Depositing user: Miss Sharon Kelly
Date Deposited: 11 Apr 2011 16:41
Last modified: 27 Mar 2014 08:51
URI: http://strathprints.strath.ac.uk/id/eprint/16514

Actions (login required)

View Item