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Fabrication of planar GaN-based micro-pixel light emitting diode arrays

Massoubre, D. and Watson, I.M. and McKendry, J. and Guilhabert, B.J.E. and Gong, Z. and Gu, E. and Dawson, M.D. (2009) Fabrication of planar GaN-based micro-pixel light emitting diode arrays. IEEE Lasers and Electro-Optics Society Annual Meeting. p. 84. ISSN 1092-8081 (Unpublished)

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Abstract

Micro-pixelated GaN light-emitting diodes (‘micro-LED’s) offer attractions for a wide range of applications including microdisplays, mask-free photolithography, lab-on-a-chip and bioinstrumentation [1]. Mesa dry etching methods have underpinned the development of this technology to date. Here we propose and demonstrate a new planar process which simplifies the process flow and permits individually-addressable pixelated devices to be fabricated without any obvious degradation of electrical and optical performance. The approach is based on the intrinsic high resistivity of the p-type GaN layer for pixel to pixel electrical isolation and on a CHF3 plasma treatment to dramatically reduce current leakage through the p-GaN/metal interface. Consequently, this process requires a lower number of fabrication steps than previously used processes using mesa etching for pixel definition and dielectric deposition for electrical insulation [2]. It leads to a planar active area well suited for further integration of functional micro-elements, including microfluidic-channels, microoptics or luminescent materials for colour conversion [3, 4]. This new fabrication route has been validated by fabricating and characterizing an individually addressable micro-stripe LED array emitting at 470 nm.

Item type: Article
ID code: 16500
Keywords: diode arrays, microdisplays, mask-free photolithography, Physics, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering
Subjects: Science > Physics
Department: Faculty of Science > Institute of Photonics
Faculty of Science > Physics
Related URLs:
    Depositing user: Miss Sharon Kelly
    Date Deposited: 01 Jun 2011 14:46
    Last modified: 05 Sep 2014 00:22
    URI: http://strathprints.strath.ac.uk/id/eprint/16500

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