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Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)

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Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.