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Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01, Edinburgh, United Kingdom. (Unpublished)

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Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

Item type: Conference or Workshop Item (Paper)
ID code: 12823
Keywords: monolithic 3-axis piezoresistive accelerometer, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
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Depositing user: Strathprints Administrator
Date Deposited: 03 Aug 2010 15:05
Last modified: 17 Jul 2013 15:40
URI: http://strathprints.strath.ac.uk/id/eprint/12823

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