Picture of two heads

Open Access research that challenges the mind...

The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs. Strathprints provides access to thousands of Open Access research papers by University of Strathclyde researchers, including those from the School of Psychological Sciences & Health - but also papers by researchers based within the Faculties of Science, Engineering, Humanities & Social Sciences, and from the Strathclyde Business School.

Discover more...

Design and characterization of a radio frequency MEMS inductor using silicon MEMS foundry process

Li, L. and Uttamchandani, D.G. (2008) Design and characterization of a radio frequency MEMS inductor using silicon MEMS foundry process. In: PIERS 2008 Hangzhou: Progress in Electromagnetics Research Symposium. Progress in Electromagnetics Research Symposium . The Electromagnetics Academy, pp. 925-928. ISBN 978-1-934142-00-4

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

A successful design of RF inductor based on a silicon MEMS foundry process is presented. The suspended inductor has been realized in electroplated thick nickel with front side bulk micromachining of the substrate. The overall size of the inductor is about 1 mm x 1 mm. The inductors have been experimentally characterized and inductances around 2 nH in the frequency range of 200 MHz-7 GHz have been measured with self resonant frequency of 9.8 GHz. The peak measured value of the Q factor is 12 at a frequency of 4 GHz. After de-embedding, the Q factor reaches 13 at a frequency of 4.8 GHz. Simulation based on a parameter extraction method has been carried out for the inductor. There is a good agreement between simulated and experimental results.