Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation

Li, L. and Begbie, M. (2006) A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation. IEEE Photonics Technology Letters, 18 (22). pp. 2422-2424. ISSN 1041-1135

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.

Item type: Article
ID code: 12043
Keywords: biomedical electrodes, biomedical optical imaging, electrostatics, finite element methods, mathematical model, micromechanical devices, micromirrors, optical devices, optical microscopy, voltage control, Electrical engineering. Electronics Nuclear engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 24 Nov 2011 18:57
    Last modified: 16 Jul 2013 22:36
    URI: http://strathprints.strath.ac.uk/id/eprint/12043

    Actions (login required)

    View Item