Li, L. and Begbie, M. (2006) A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation. IEEE Photonics Technology Letters, 18 (22). pp. 2422-2424. ISSN 1041-1135Full text not available in this repository. (Request a copy from the Strathclyde author)
We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.
|Keywords:||biomedical electrodes, biomedical optical imaging, electrostatics, finite element methods, mathematical model, micromechanical devices, micromirrors, optical devices, optical microscopy, voltage control, Electrical engineering. Electronics Nuclear engineering, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering|
|Depositing user:||Strathprints Administrator|
|Date Deposited:||24 Nov 2011 18:57|
|Last modified:||22 Mar 2017 10:14|