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The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs.

Strathprints serves world leading Open Access research by the University of Strathclyde, including research by the Strathclyde Institute of Pharmacy and Biomedical Sciences (SIPBS), where research centres such as the Industrial Biotechnology Innovation Centre (IBioIC), the Cancer Research UK Formulation Unit, SeaBioTech and the Centre for Biophotonics are based.

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Design, simulation and characterization of a MEMS optical scanner

Li, L. and Begbie, M. and Brown, J.G. and Uttamchandani, D.G. (2007) Design, simulation and characterization of a MEMS optical scanner. Journal of Micromechanics and Microengineering, 17 (9). pp. 1781-1787. ISSN 0960-1317

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Abstract

This paper reports on the design, simulation and opto-electro-mechanical characterization of a microelectromechanical system (MEMS) scanner actuated by an out-of-plane (vertical) electrothermal actuator that was fabricated using a single layer silicon-on-insulator (SOI) foundry process. The overall size of the scanner, including the micromirror and the actuator, is 2 mm × 1 mm. A maximum static mechanical tilting angle of 5° is achieved at a dc driving voltage of 18 V and current of 23 mA, corresponding to a 10° optical scan angle. The scanner can be operated from dc to low frequencies (the 3 dB bandwidth is from 0 Hz to 80 Hz), which meets the requirement for certain practical opto-electronic systems such as optical coherence tomography (OCT) systems. The scanner has a maximum mechanical tilting angle of 8° at its resonant frequency of 2.19 kHz, corresponding to a total of 16° maximum optical scan angle. Simulations of static and dynamic performances of the scanner have been conducted using finite element method (FEM) software, resulting in outcomes similar to the experimental findings. A thermal response time of 60 ms is calculated numerically using heat flow theory, while a thermal response time of 55.6 ms was experimentally obtained by analysing the intensity distribution of the scanned patterns generated when using a square driving waveform to drive the scanner.